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Catalog No. AL3258. Material Al2O3, AlN, Sapphire. Size Designed for φ200/300mm Equipment. Purity ≥99.9% Electrostatic Chuck Description. A built-in electrode is embedded, using the electrostatic force generated between the structure and the silicon wafer placed on the surface of the ESC.
- Transparent
- 3.97
- 99.99
- Sapphire
An electrostatic chuck (ESC) is a device used to hold a substrate in place during various processes, such as semiconductor manufacturing. The ESC is made of a ceramic material, such as alumina (Al2O3), aluminum nitride (AlN), or sapphire, and is designed to hold the substrate through electrostatic attraction.
- CERAMICS
- 95% 99% 99.7%
- Al2O3
- Customized
Introduction. SHINKO designs ceramic electrostatic chucks which are widely used for semiconductor wafer processing such as etching and CVD equipment. SHINKO offers high quality, low cost, short lead time and manufactures using consistent production processes such as firing and machining of ceramic, assembly and inspection.
Electrostatic Chuck (ESC or e-chuck) surface refinishing is available from Valley Design. Chucks can be made flat, concave or convex, and in any surface finish from lapped to polished.
An internal electrode is embedded to utilize the electrostatic force generated between this structure and the Si wafer placed on the ESC surface. This product is used for silicon wafer mounting, flatness correction and cooling the silicon wafer during the semiconductor manufacturing process.
SAPPHIRE Technology 持續成為世界領先的創新圖形和主機板產品製造廠商和全球供應商，為 PC 市場提供基於 AMD Radeon 的產品，滿足了遊戲、電子競技和高效能顯示卡愛好者的需求，並提供一系列專業圖形產品和嵌入式系統解決方案。.
HES Industries provides customers clamping capability of a wide variety of materials that are not only conductive but also dielectric such as Glass and Sapphire. All ESC's are tested to fully meet customer specifications. The table below outlines the capabilities
